surface flatness

CD Stamper production is an essential part as a whole of the Compact Disk production. CD Stamper surface parameters, such as surface flatness 、 roughness and disfigurement density, etc, have great influence on the quality of the production of Compact Discs.

光盘母盘的制作是整个光盘生产中必不可少的一个环节，光盘母盘表面的技术参数，如表面平整度、粗糙度和缺陷密度等等，将直接影响到生产光盘的质量。

Describes several measuring methods of flatness of large plane. Analyzes the characteristics and error of these methods including indirect measuring method, dual laser beams scanning method, laser criterion line scanning method, diffraction plane criterion method and level surface method.

叙述了几种大平面平面度的测量方法，分析了间接测量法、激光双光束扫描法、激光准直扫射法、衍射平面基准法、液面法等几种方法的特点及其测量误差。

Microscope observation: In the animal model group, the articular cartilage surface was out of flatness and rough with many fissures inside. The articular cartilage desquamation was found in part tissues and the defect areas then formed.

普通光学显微镜下观察模型组：软骨组织表面不平整和不光滑，出现了许多的裂隙，同时部分组织内可见有软骨的剥脱，继而形成了缺损区，表浅层细胞的部分消失。

The silver electrode of piezoelectric ceramic transducer requires high flatness and surface quality, but it is extremely thin ( 50~ 60 μ m).

压电陶瓷换能器两端的银电极要求较高的平面度及较好的表面质量。

Surface flatness measured on40 nm silicon wafers is comparable between the two methods, but our method is better than other published dummy fill methods.

在使用40纳米工艺的晶圆上，基于模型方法得到的表面平坦度与基于规则的填充方法相当，但是比公开的其它填充方法要好。